Perfluoroelastomer 75 Durometer O-Ring, Low Particle, Translucent Black (FF370-75)

Parker’s perfluoroelastomer FF370-75 (Ultra® FFKM) is a black, opaque, non-filled material for high purity semiconductor processing.  FF370-75 features minimum metallic ion content, Ultra high purity and low extractables, minimum particle generation, and is plasma resistant with a very low erosion rate

• Heat resistance — Up to 300°C (572°F)
• Cold flexibility — Down to -15°C (5°F)

Chemical resistance
• Fluorine plasma (NF3, SF6¬, C¬4F8, etc.)
• HBr and Chlorine Plasmas (HBr, Cl2, etc.)
• Chlorinated hydrocarbons
• Polar solvents (ketones, esters, ethers)
• Inorganic and organic acids
• Water
• High vacuum with minimal loss in weight

Not compatible with:
• Fluorinated refrigerants (R11, 12, 13, 113, 114, etc.)
• Perfluorinated lubricants (PFPE)

Used for low outgassing, low particle generation, chemical vapor deposition and etch processes.

*Custom sizes and coatings/markings are available upon request. Contact Parker O-Ring & Engineered Seals Division at 859-269-2351 for design and pricing assistance.