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UHP Stainless Steel Check Valve – F9 Series

The F9 Series is a high purity, all welded check valve offering high Cv up to 0.90 in a small footprint to conserve much needed panel space. The F9 is ideally suited for semiconductor fab applications, VMB/VMP, and gas cabinet manufacturers.

  • Body Material:

    VeriClean 316L Stainless Steel

  • Spring Material:

    Elgiloy, equivalent

  • Seal Material:

    Fluorocarbon Elastomer (FKM), Perfluoroelastomer (FFKM)

  • Poppet Material:

    316L Stainless Steel

  • Seat Material:

    316 Stainless Steel

  • Flow Rate:

    Cv: 0.45 (X 0.89) (1/4″ Tube Stub) – 0.90 (X 0.78) (1/4″ & 1/2″ Face Seal) – 0.90 (X 0.78) (3/8″ & 1/2″ Tube Stub)

  • Internal Leak Rate:

    Bubble Tight

  • External Leak Rate:

    < 1 X 10-9 scc/sec He (Inboard Test Method)

  • Surface Finish:

    Omit (10 Ra Passivate (std), gold label) – EP (7 Ra Electropolished, blue label)

  • Volume:

    0.14 inch3 / 2.29 cm3 (1/4″ Face Seal Male)

  • Weight:

    0.15 (1/4″ Face Seal Male) – 0.07 (1/4″ Tube Stub) lb, 2.4 (1/4″ Face Seal Male) – 1.2 (1/4″ Tube Stub) oz

  • Maximum Inlet Pressure Rating:

    Fluorocarbon Elastomer, FKM: 3000 | Perfluoroelastomer, FFKM: 1000 psig, 206 barg (Fluorocarbon Elastomer, FKM) – 68 barg (Perfluoroelastomer, FFKM) barg

  • Maximum Back Pressure:

    3,000 (Fluorocarbon Elastomer, FKM); 1,000 (Perfluoroelastomer, FFKM) psig, 206 barg (Fluorocarbon Elastomer, FKM) – 68 barg (Perfluoroelastomer, FFKM) barg

  • Cracking Pressure:

    0.13 bar, 2 psi

  • Reset Pressure:

    ≤ 2 psig, ≤ 0.13 barg

  • Maximum Operating Temperature:

    66 °C, 150 °F

  • Minimum Operating Temperature:

    -23 °C, -10 °F

Parker Veriflo Division’s F9 Series UHP Check Valve offers improved performance and compatibility featuring a patented asymmetric spring design for a consistently quiet operation and a lower flow restriction compared to competition. The F9’s two seal materials meet all Semi gas compatibility requirements, reducing customer inventories and meeting a wider range of applications. Assembled and packaged in a Class 100 clean room, the F9 is designed for use in ultrahigh purity semiconductor applications.

Markets:
• Semiconductor Fab
• Gas Companies

Features/Benefits:
• Noise Free Operation with the patented asymmetric spring design
• Welded design reduces footprint
• Two seal offerings to meet all SEMI gas compatibility requirements
• Class 100 clean room assembled and packaged
• Electropolished (EP) version for Ultra High Purity applications available
• VeriClean™ 316L Stainless Steel enhances electropolishing and corrosion resistance

Applications:
• Valve Manifold Boxes/Panels
• Gas Cabinets
• Gas Sticks
• Tool Hook-Up
Literature and Reference Materials
Veriflo Product Selection & Operation Safety Guide
Veriflo–F9 Series – Technical Data Sheet