Ultra High Purity Valves

Parker’s comprehensive range of valve terminals and controls comprises digital modules for industrial hydraulic valves as well as controllers for electrically operated stepper motor refrigeration valves. We offer a range of different amplifiers for hydraulic proportional valves without onboard electronics, closed loop control modules and electronics for command signal processing. These digital modules are compact and easy to install. Our electronic refrigeration controllers provide unmatched control of electric valves for a variety of refrigeration and air conditioning applications.

Ultra-High Purity (UHP) Low Flow, Low Pressure Diaphragm Valve – 930 Series

The 930 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.

Ultra-High Purity (UHP) Surface Mount Diaphragm Valve - SM930 Series

The SM930 Series surface mount valve provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor tool applications requiring flow capacities up to 0.30 Cv and operating pressures up to 250 psig

Ultra-High Purity (UHP) High Flow Diaphragm Valve – 955 Series

The 955 Series provides excellent reliability, leak integrity, and cleanliness making it ideal for use in UHP semiconductor applications needing flow capacities up to 0.55 Cv and operating pressures up to 250 psig.

UHP PTFE Fluoropolymer Check Valve (up to 1-1/2 inch) – CV-1 Series

The CV-1 Series Check Valve has a machined PTFE spring that allows for low cracking pressure operation and minimal back pressure for resealing. It offers exceptional corrosion resistance and is designed for use in ultra-high purity applications.

Ultra-High Purity (UHP) High-Pressure Diaphragm Valve – 945 Series

The 945 Series Diaphragm Valve provides excellent reliability and leak integrity, making it ideal for use in UHP applications. Available in configurations with flow capacities up to 0.25 Cv and working pressures up to 3,500 psig.

UHP PTFE Air-operated Slurry Valve (up to 1 inch) – PV-20 Series

The PV-20 Series PTFE Slurry Valve offers exceptional sealing of aggressive chemicals and abrasive slurry media. The valve minimizes particle generation and is designed for use in semiconductor manufacturing and clean-area applications.

Ultra-High Purity (UHP) Low Flow/Pressure Diaphragm Valve Manifold – 930Y Series

The 930Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.30 Cv and operating pressures up to 300 psig.

UHP PTFE Manual Slurry Valve (up to 1 inch) – MV-20 Series

The MV-20 Series PTFE Slurry Valve offers exceptional sealing of aggressive chemicals and abrasive slurry media. The valve minimizes particle generation and is designed for use in semiconductor manufacturing and clean-area applications.

Ultra-High Purity (UHP) High-pressure Diaphragm Valve Manifold – 945Y Series

The 945Y Series combines two valves into a single body simplifying the integration of a purge line into a gas system. Ideal for (ultra-high purity) semiconductor applications needing flow capacities up to 0.25 Cv and operating pressures up to 3500 psig.

UHP Stainless Steel Tied-diaphragm Valve (up to 300 psig) – 935 Series

The 935 Series valve is intended for use in ultra-high purity gas distribution systems. It provides superior control of gases under high-flow, low-pressure conditions, where high leak integrity and absolute purity is essential.

UHP Horizontal Cross Tied-diaphragm Valve (up to 300 psig) – 935A and 935T Series

The 935A and 935T Series is a ½ inch valve with a body that incorporates a flow through tube connection up to 2 inches diameter. This design simplifies the integration of drop line isolation valves into lateral gas distribution systems.

UHP Diaphragm Y-Valve – Manual or Air-actuated (vacuum to 250 psig) – 955Y Series

The 955Y Series Diaphragm Valve (Y block body) combines two high flow capacity valves into a single compact body simplifying the integration of a purge system into a gas manifold while improving the effectiveness of the purge process.

UHP Stainless Steel Check Valve – F9 Series

The F9 Series is a high purity, all welded check valve offering high Cv up to 0.90 in a small footprint to conserve much needed panel space. The F9 is ideally suited for semiconductor fab applications, VMB/VMP, and gas cabinet manufacturers.

Ultra-High Purity (UHP) High Flow Diaphragm Valve – 970 Series

The 970 Series Diaphragm Valve offers exceptional cycle life, leak integrity, and cleanliness. It can be manually or air-operated and is ideally suited for use in high-flow UHP semiconductor applications.

UHP PTFE Fluoropolymer Relief Valve (1/4 inch) – RV Series

The RV Series is a PTFE relief valve that’s ideally suited for ultra-high purity semiconductor, DI water, and aggressive chemical applications. The valve is highly compact and can be adjusted in the field to provide safe and reliable pressure relief.

Ultrahigh-purity (UHP) High-flow Diaphragm Valve – 870 Series

The 870 Series Diaphragm Valve offers long life and exceptional leak integrity. It can be manually or air-operated and is ideally suited for use in high-flow, high-purity applications (maximum flow capacity = 0.70 Cv).

PTFE Manual Stop Cock 2 Way or 3 Way Valve – MV-1 Series

The MV-1 Series PTFE Manual Stop Cock Valve offers high cycle life and excellent resistance to corrosion. It is available in a variety of sizes and flow capacities and is ideal for use in highly aggressive liquid applications (up to 60 psig).

Pressure Relief Valve - VR7 Series

The Parker VR7 Series Pressure Relief Valve is designed to ensure safety and protection of downstream process equipment by venting excess pressure from a regulator should a minor seat leak occur. It is available in stainless steel.

PTFE UHP Manual Ball Valve (sizes up to 1 inch) – MV-6 Series

The MV-6 Series PTFE Manual Ball Valve offers high cycle life and exceptional resistance to corrosion. It is designed full port for minimal flow restriction and is ideal for use in aggressive chemical applications (up to 120 psig).

UHP Surface Mount Diaphragm Valve – Manual or Air-actuated (vacuum to 250 psig) – SM955 Series

The SM955 Series Diaphragm Valve is available with a variety of manual operators and air-operated actuators. It provides excellent reliability and leak integrity making it ideal for use in UHP semiconductor modular surface-mount system applications.

UHP High-Flow Bulk Facility Valve (up to 375 psig) – 700 Series

The 700 Series High-Flow Bulk Facility Valve is intended for use in ultra-high purity gas distribution systems. It features a unique lightweight design that reduces installation costs and can accommodate connection sizes up to 6-inches.

Stainless Steel Bellows Valve Manual & Pneumatic - 500 Series

Parker Hannifin Corporation's Veriflo Division presents the 500 Series Manual & Pneumatic Operated Bellows Valves. These valves are designed with the industry's leading straight-through full flow.

UHP PTFE Fluoropolymer High-flow Check Valve (2 inch) – CV-32 Series

The CV-32 Series PTFE High-flow Check Valve provides low cracking pressure and high integrity sealing for back flow protection. It is ideally suited for bulk chemical delivery systems used in ultra-high purity semiconductor manufacturing applications.

High Flow, Compact Size Diaphragm Valve - NV70 Series

The NV70 is an economical, general purpose, high flow diaphragm valve ideally suited when flowing large volumes of corrosive and non-corrosive fluids.